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Single-Crystal-Silicon Continuous Membrane Deformable Mirror Array for Adaptive Optics

Il Woong Jung, Yves-Alain Peter, Emily Carr, Jen-Shiang Wang and Olav Solgaard

Paper (2006)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/22931/
Conference Title: IEEE/LEOS International Conference on Optical MEMS and Their Applications
Conference Location: Big Sky, MT, USA
Conference Date(s): 2006-08-21 - 2006-08-24
Publisher: IEEE
DOI: 10.1109/omems.2006.1708310
Official URL: https://doi.org/10.1109/omems.2006.1708310
Date Deposited: 18 Apr 2023 15:17
Last Modified: 05 Apr 2024 11:07
Cite in APA 7: Jung, I. W., Peter, Y.-A., Carr, E., Wang, J.-S., & Solgaard, O. (2006, August). Single-Crystal-Silicon Continuous Membrane Deformable Mirror Array for Adaptive Optics [Paper]. IEEE/LEOS International Conference on Optical MEMS and Their Applications, Big Sky, MT, USA. https://doi.org/10.1109/omems.2006.1708310

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