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Laser induced formation of periodic nanostructures in silicon covered by SiO₂

Y. Liao, Jean-Yves Degorce and Michel Meunier

Article (2006)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/22832/
Journal Title: Applied Physics. A, Materials Science & Processing (vol. A82, no. 4)
Publisher: Springer
DOI: 10.1007/s00339-005-3438-3
Official URL: https://doi.org/10.1007/s00339-005-3438-3
Date Deposited: 18 Apr 2023 15:17
Last Modified: 05 Apr 2024 11:07
Cite in APA 7: Liao, Y., Degorce, J.-Y., & Meunier, M. (2006). Laser induced formation of periodic nanostructures in silicon covered by SiO₂. Applied Physics. A, Materials Science & Processing, A82(4), 679-682. https://doi.org/10.1007/s00339-005-3438-3

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