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Arrays of Periodic Submicron Conductive Links in Si Covered by SiO₂ Formed by Polarized Laser Irradiation

Y. G. Liao and Michel Meunier

Article (2006)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/22831/
Journal Title: Semiconductor Science and Technology (vol. 21, no. 7)
Publisher: IOP Publishing
DOI: 10.1088/0268-1242/21/7/006
Official URL: https://doi.org/10.1088/0268-1242/21/7/006
Date Deposited: 18 Apr 2023 15:17
Last Modified: 05 Apr 2024 11:07
Cite in APA 7: Liao, Y. G., & Meunier, M. (2006). Arrays of Periodic Submicron Conductive Links in Si Covered by SiO₂ Formed by Polarized Laser Irradiation. Semiconductor Science and Technology, 21(7), 860-865. https://doi.org/10.1088/0268-1242/21/7/006

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