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Stability and effect of annealing on the optical properties of plasma-deposited Ta₂O₅ and Nb₂O₅ films

Ludvik Martinu, J.-P. Masse, H. Szymanowski, O. Zabeida, A. Amassian and Jolanta-Ewa Sapieha

Article (2006)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/22771/
Journal Title: Thin Solid Films (vol. 515, no. 4)
Publisher: Elsevier
DOI: 10.1016/j.tsf.2006.05.047
Official URL: https://doi.org/10.1016/j.tsf.2006.05.047
Date Deposited: 18 Apr 2023 15:17
Last Modified: 05 Apr 2024 11:07
Cite in APA 7: Martinu, L., Masse, J.-P., Szymanowski, H., Zabeida, O., Amassian, A., & Sapieha, J.-E. (2006). Stability and effect of annealing on the optical properties of plasma-deposited Ta₂O₅ and Nb₂O₅ films. Thin Solid Films, 515(4), 1674-1682. https://doi.org/10.1016/j.tsf.2006.05.047

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