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Mechanical and Optical Properties of Quaternary Si-B-C-N Films Prepared by Reactive Magnetron Sputtering

J. Čížek, J. Vlček, Š. Potocký, J. Houška, Z. Soukup, J. Kalaš, P. Jedrzejowski, Jolanta-Ewa Sapieha and Ludvik Martinu

Article (2008)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/20931/
Journal Title: Thin Solid Films (vol. 516, no. 21)
Publisher: Elsevier
DOI: 10.1016/j.tsf.2007.12.156
Official URL: https://doi.org/10.1016/j.tsf.2007.12.156
Date Deposited: 18 Apr 2023 15:15
Last Modified: 05 Apr 2024 11:04
Cite in APA 7: Čížek, J., Vlček, J., Potocký, Š., Houška, J., Soukup, Z., Kalaš, J., Jedrzejowski, P., Sapieha, J.-E., & Martinu, L. (2008). Mechanical and Optical Properties of Quaternary Si-B-C-N Films Prepared by Reactive Magnetron Sputtering. Thin Solid Films, 516(21), 7286-7293. https://doi.org/10.1016/j.tsf.2007.12.156

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