Mechanical and Optical Properties of Quaternary Si-B-C-N Films Prepared by Reactive Magnetron Sputtering

J. Čížek, J. Vlček, Š. Potocký, J. Houška, Z. Soukup, J. Kalaš, Pawel Jedrzejowski, Jolanta-Ewa Sapieha, Ludvik Martinu

Article (2008)

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Journal Title :
Thin Solid Films ( vol. 516 , no. 21 )
Publisher:
Elsevier
OAI:
oai:publications.polymtl.ca:20931
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Date Deposited:
18 Apr 2023 15:15
Last Modified:
14 Oct 2026 12:53
Cite in APA 7:
Čížek, J., Vlček, J., Potocký, Š., Houška, J., Soukup, Z., Kalaš, J., Jedrzejowski, P., Sapieha, J.-E., & Martinu, L. (2008). Mechanical and Optical Properties of Quaternary Si-B-C-N Films Prepared by Reactive Magnetron Sputtering. Thin Solid Films, 516(21), 7286-7293. https://doi.org/10.1016/j.tsf.2007.12.156

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