J. Čížek, J. Vlček, Š. Potocký, J. Houška, Z. Soukup, J. Kalaš, Pawel Jedrzejowski, Jolanta-Ewa Sapieha and Ludvik Martinu
Article (2008)
An external link is available for this item| Department: | Department of Engineering Physics |
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| Research Center: | GCM - Thin Film Physics and Technology Research Group |
| PolyPublie URL: | https://publications.polymtl.ca/20931/ |
| Journal Title: | Thin Solid Films (vol. 516, no. 21) |
| Publisher: | Elsevier |
| DOI: | 10.1016/j.tsf.2007.12.156 |
| Official URL: | https://doi.org/10.1016/j.tsf.2007.12.156 |
| Date Deposited: | 18 Apr 2023 15:15 |
| Last Modified: | 25 Sep 2024 15:59 |
| Cite in APA 7: | Čížek, J., Vlček, J., Potocký, Š., Houška, J., Soukup, Z., Kalaš, J., Jedrzejowski, P., Sapieha, J.-E., & Martinu, L. (2008). Mechanical and Optical Properties of Quaternary Si-B-C-N Films Prepared by Reactive Magnetron Sputtering. Thin Solid Films, 516(21), 7286-7293. https://doi.org/10.1016/j.tsf.2007.12.156 |
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