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Microlens Array Fabrication by Backside Exposure Using Fraunhofer Diffraction

In-Hyouk Song, K. N. Kang, Y. Jin, D. S. W. Park and P. K. Ajmera

Article (2008)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/20233/
Journal Title: Microsystem Technologies-Micro-and Nanosystems-Information Storage and Processing Systems (vol. 14, no. 9-11)
Publisher: Springer
DOI: 10.1007/s00542-007-0510-2
Official URL: https://doi.org/10.1007/s00542-007-0510-2
Date Deposited: 18 Apr 2023 15:16
Last Modified: 05 Apr 2024 11:03
Cite in APA 7: Song, I.-H., Kang, K. N., Jin, Y., Park, D. S. W., & Ajmera, P. K. (2008). Microlens Array Fabrication by Backside Exposure Using Fraunhofer Diffraction. Microsystem Technologies-Micro-and Nanosystems-Information Storage and Processing Systems, 14(9-11), 1285-1290. https://doi.org/10.1007/s00542-007-0510-2

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