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Nitrogen-Rich Plasma Polymers: Comparison of Films Deposited in Atmospheric- and Low-Pressure Plasmas

Florina Truica-Marasescu, Pierre-Luc Girard-Lauriault, Andreas Lippitz, Wolfgang E. S. Unger and Michael R. Wertheimer

Article (2008)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/20164/
Journal Title: Thin Solid Films (vol. 516, no. 21)
Publisher: Elsevier
DOI: 10.1016/j.tsf.2008.02.033
Official URL: https://doi.org/10.1016/j.tsf.2008.02.033
Date Deposited: 18 Apr 2023 15:16
Last Modified: 05 Apr 2024 11:03
Cite in APA 7: Truica-Marasescu, F., Girard-Lauriault, P.-L., Lippitz, A., Unger, W. E. S., & Wertheimer, M. R. (2008). Nitrogen-Rich Plasma Polymers: Comparison of Films Deposited in Atmospheric- and Low-Pressure Plasmas. Thin Solid Films, 516(21), 7406-7417. https://doi.org/10.1016/j.tsf.2008.02.033

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