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A robustness approach for handling modeling errors in parallel-plate electrostatic MEMS control

Guchuan Zhu, Lahcen Saydy, M. Hosseini, J.-F. Chianetta and Yves-Alain Peter

Article (2008)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/20079/
Journal Title: Journal of Microelectromechanical Systems (vol. 17, no. 6)
Publisher: IEEE
DOI: 10.1109/jmems.2008.2005291
Official URL: https://doi.org/10.1109/jmems.2008.2005291
Date Deposited: 18 Apr 2023 15:16
Last Modified: 05 Apr 2024 11:03
Cite in APA 7: Zhu, G., Saydy, L., Hosseini, M., Chianetta, J.-F., & Peter, Y.-A. (2008). A robustness approach for handling modeling errors in parallel-plate electrostatic MEMS control. Journal of Microelectromechanical Systems, 17(6), 1302-1314. https://doi.org/10.1109/jmems.2008.2005291

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