A robustness approach for handling modeling errors in parallel-plate electrostatic MEMS control

Guchuan Zhu, Lahcen Saydy, M. Hosseini, J.-F. Chianetta, Yves-Alain Peter

Article (2008)

Access this document
External link
An external link is available for this item
Journal Title :
Journal of Microelectromechanical Systems ( vol. 17 , no. 6 )
Publisher:
IEEE
OAI:
oai:publications.polymtl.ca:20079
ORCID
Date Deposited:
18 Apr 2023 15:16
Last Modified:
08 Oct 2026 17:14
Cite in APA 7:
Zhu, G., Saydy, L., Hosseini, M., Chianetta, J.-F., & Peter, Y.-A. (2008). A robustness approach for handling modeling errors in parallel-plate electrostatic MEMS control. Journal of Microelectromechanical Systems, 17(6), 1302-1314. https://doi.org/10.1109/jmems.2008.2005291

Statistics

Dimensions

Repository Staff Only

View Item
View Item