Guchuan Zhu
, Lahcen Saydy, M. Hosseini, J.-F. Chianetta and Yves-Alain Peter
Article (2008)
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| Department: | Department of Engineering Physics |
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| PolyPublie URL: | https://publications.polymtl.ca/20079/ |
| Journal Title: | Journal of Microelectromechanical Systems (vol. 17, no. 6) |
| Publisher: | IEEE |
| DOI: | 10.1109/jmems.2008.2005291 |
| Official URL: | https://doi.org/10.1109/jmems.2008.2005291 |
| Date Deposited: | 18 Apr 2023 15:16 |
| Last Modified: | 25 Sep 2024 15:58 |
| Cite in APA 7: | Zhu, G., Saydy, L., Hosseini, M., Chianetta, J.-F., & Peter, Y.-A. (2008). A robustness approach for handling modeling errors in parallel-plate electrostatic MEMS control. Journal of Microelectromechanical Systems, 17(6), 1302-1314. https://doi.org/10.1109/jmems.2008.2005291 |
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