A. Amassian, M. Dudek, O. Zabeida, S. C. Gujrathi, Jolanta-Ewa Sapieha
and Ludvik Martinu
Article (2009)
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| Department: | Department of Engineering Physics |
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| Research Center: | RQMP - Regroupement québécois sur les matériaux de pointe |
| PolyPublie URL: | https://publications.polymtl.ca/20037/ |
| Journal Title: | Journal of vacuum science and technology. A, Vacuum, surfaces, and films (vol. 27, no. 2) |
| Publisher: | American Vacuum Society |
| DOI: | 10.1116/1.3081970 |
| Official URL: | https://doi.org/10.1116/1.3081970 |
| Date Deposited: | 18 Apr 2023 15:14 |
| Last Modified: | 27 Sep 2024 11:22 |
| Cite in APA 7: | Amassian, A., Dudek, M., Zabeida, O., Gujrathi, S. C., Sapieha, J.-E., & Martinu, L. (2009). Oxygen incorporation and charge donor activation via subplantation during growth of indium tin oxide films. Journal of vacuum science and technology. A, Vacuum, surfaces, and films, 27(2), 362-366. https://doi.org/10.1116/1.3081970 |
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