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Oxygen incorporation and charge donor activation via subplantation during growth of indium tin oxide films

A. Amassian, M. Dudek, O. Zabeida, S. C. Gujrathi, Jolanta-Ewa Sapieha and Ludvik Martinu

Article (2009)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/20037/
Journal Title: Journal of vacuum science and technology. A, Vacuum, surfaces, and films (vol. 27, no. 2)
Publisher: American Vacuum Society
DOI: 10.1116/1.3081970
Official URL: https://doi.org/10.1116/1.3081970
Date Deposited: 18 Apr 2023 15:14
Last Modified: 05 Apr 2024 11:02
Cite in APA 7: Amassian, A., Dudek, M., Zabeida, O., Gujrathi, S. C., Sapieha, J.-E., & Martinu, L. (2009). Oxygen incorporation and charge donor activation via subplantation during growth of indium tin oxide films. Journal of vacuum science and technology. A, Vacuum, surfaces, and films, 27(2), 362-366. https://doi.org/10.1116/1.3081970

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