J. Kalaš, Richard Vernhes, S. Hřeben, J. Vlček, Jolanta-Ewa Sapieha
and Ludvik Martinu
Article (2009)
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| Department: | Department of Engineering Physics |
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| Research Center: | GCM - Thin Film Physics and Technology Research Group |
| PolyPublie URL: | https://publications.polymtl.ca/19405/ |
| Journal Title: | Thin Solid Films (vol. 518, no. 1) |
| Publisher: | Elsevier |
| DOI: | 10.1016/j.tsf.2009.06.017 |
| Official URL: | https://doi.org/10.1016/j.tsf.2009.06.017 |
| Date Deposited: | 18 Apr 2023 15:14 |
| Last Modified: | 25 Sep 2024 15:57 |
| Cite in APA 7: | Kalaš, J., Vernhes, R., Hřeben, S., Vlček, J., Sapieha, J.-E., & Martinu, L. (2009). High-temperature stability of the mechanical and optical properties of Si-B-C-N films prepared by magnetron sputtering. Thin Solid Films, 518(1), 174-179. https://doi.org/10.1016/j.tsf.2009.06.017 |
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