High-temperature stability of the mechanical and optical properties of Si-B-C-N films prepared by magnetron sputtering

J. Kalaš, Richard Vernhes, S. Hřeben, J. Vlček, Jolanta-Ewa Sapieha and Ludvik Martinu

Article (2009)

An external link is available for this item

Department:	Department of Engineering Physics
Research Center:	GCM - Thin Film Physics and Technology Research Group
PolyPublie URL:	https://publications.polymtl.ca/19405/
Journal Title:	Thin Solid Films (vol. 518, no. 1)
Publisher:	Elsevier
DOI:	10.1016/j.tsf.2009.06.017
Official URL:	https://doi.org/10.1016/j.tsf.2009.06.017
Date Deposited:	18 Apr 2023 15:14
Last Modified:	25 Sep 2024 15:57

Cite in APA 7:	Kalaš, J., Vernhes, R., Hřeben, S., Vlček, J., Sapieha, J.-E., & Martinu, L. (2009). High-temperature stability of the mechanical and optical properties of Si-B-C-N films prepared by magnetron sputtering. Thin Solid Films, 518(1), 174-179. https://doi.org/10.1016/j.tsf.2009.06.017
APA 7 (HTML)ASCII CitationAtomBibTeXDOIsDublin CoreEndNote (.ENW)MARC (ISO 2709/UTF-8) (.MRC)MARC (UTF-8) (.MRK8)MARC XMLMPEG-21 DIDLMultiline CSVOAI-ORE Resource Map (Atom Format)OPENAIREOpenURL ContextObjectOpenURL ContextObject in SpanRDF+N-TriplesRDF+N3RDF+XMLReferReference Manager (.RIS)Répertoire des publications (EndNote)Simple Metadata

Statistics

Repository Staff Only