Dynamics of reactive high-power impulse magnetron sputtering discharge studied by time- and space-resolved optical emission spectroscopy and fast imaging

M. Hala, N. Viau, O. Zabeida, Jolanta-Ewa Sapieha et Ludvik Martinu

Article de revue (2010)

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Département:	Département de génie physique
URL de PolyPublie:	https://publications.polymtl.ca/18217/
Titre de la revue:	Journal of Applied Physics (vol. 107, no 4)
Maison d'édition:	American Institute of Physics
DOI:	10.1063/1.3305319
URL officielle:	https://doi.org/10.1063/1.3305319
Date du dépôt:	18 avr. 2023 15:13
Dernière modification:	05 avr. 2024 11:00

Citer en APA 7:	Hala, M., Viau, N., Zabeida, O., Sapieha, J.-E., & Martinu, L. (2010). Dynamics of reactive high-power impulse magnetron sputtering discharge studied by time- and space-resolved optical emission spectroscopy and fast imaging. Journal of Applied Physics, 107(4), 043305. https://doi.org/10.1063/1.3305319
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