M. Hala, N. Viau, O. Zabeida, Jolanta-Ewa Sapieha and Ludvik Martinu
Article (2010)
An external link is available for this itemDepartment: | Department of Engineering Physics |
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PolyPublie URL: | https://publications.polymtl.ca/18217/ |
Journal Title: | Journal of Applied Physics (vol. 107, no. 4) |
Publisher: | American Institute of Physics |
DOI: | 10.1063/1.3305319 |
Official URL: | https://doi.org/10.1063/1.3305319 |
Date Deposited: | 18 Apr 2023 15:13 |
Last Modified: | 18 Apr 2023 15:13 |
Cite in APA 7: | Hala, M., Viau, N., Zabeida, O., Sapieha, J.-E., & Martinu, L. (2010). Dynamics of reactive high-power impulse magnetron sputtering discharge studied by time- and space-resolved optical emission spectroscopy and fast imaging. Journal of Applied Physics, 107(4), 043305. https://doi.org/10.1063/1.3305319 |
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