Dynamics of reactive high-power impulse magnetron sputtering discharge studied by time- and space-resolved optical emission spectroscopy and fast imaging

M. Hala, N. Viau, O. Zabeida, Jolanta-Ewa Sapieha and Ludvik Martinu

Article (2010)

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Department:	Department of Engineering Physics
PolyPublie URL:	https://publications.polymtl.ca/18217/
Journal Title:	Journal of Applied Physics (vol. 107, no. 4)
Publisher:	American Institute of Physics
DOI:	10.1063/1.3305319
Official URL:	https://doi.org/10.1063/1.3305319
Date Deposited:	18 Apr 2023 15:13
Last Modified:	18 Apr 2023 15:13

Cite in APA 7:	Hala, M., Viau, N., Zabeida, O., Sapieha, J.-E., & Martinu, L. (2010). Dynamics of reactive high-power impulse magnetron sputtering discharge studied by time- and space-resolved optical emission spectroscopy and fast imaging. Journal of Applied Physics, 107(4), 043305. https://doi.org/10.1063/1.3305319
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