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Dynamics of HiPIMS discharge operated in oxygen

M. Hala, O. Zabeida, Jolanta-Ewa Sapieha and Ludvik Martinu

Article (2011)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/16796/
Journal Title: IEEE Transactions on Plasma Science (vol. 39, no. 11)
Publisher: IEEE
DOI: 10.1109/tps.2011.2150248
Official URL: https://doi.org/10.1109/tps.2011.2150248
Date Deposited: 18 Apr 2023 15:12
Last Modified: 05 Apr 2024 10:58
Cite in APA 7: Hala, M., Zabeida, O., Sapieha, J.-E., & Martinu, L. (2011). Dynamics of HiPIMS discharge operated in oxygen. IEEE Transactions on Plasma Science, 39(11), 2582-2583. https://doi.org/10.1109/tps.2011.2150248



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