Stable, high-Q fabry-perot resonators with long cavity based on curved, all-silicon, high reflectance mirrors

Maurine Malak, Nicolas Pavy, Frédéric Marty, Yves-Alain Peter, A. Q. Liu and Tarik Bourouina

Paper (2011)

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Department:	Department of Engineering Physics
ISBN:	9781424496327
PolyPublie URL:	https://publications.polymtl.ca/16522/
Conference Title:	24th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2011)
Conference Location:	Cancun, Mexico
Conference Date(s):	2011-01-23 - 2011-01-27
Publisher:	Institute of Electrical and Electronics Engineers
DOI:	10.1109/memsys.2011.5734526
Official URL:	https://doi.org/10.1109/memsys.2011.5734526
Date Deposited:	18 Apr 2023 15:12
Last Modified:	08 Apr 2025 12:19

Cite in APA 7:	Malak, M., Pavy, N., Marty, F., Peter, Y.-A., Liu, A. Q., & Bourouina, T. (2011, January). Stable, high-Q fabry-perot resonators with long cavity based on curved, all-silicon, high reflectance mirrors [Paper]. 24th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2011), Cancun, Mexico. https://doi.org/10.1109/memsys.2011.5734526
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