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Stable, high-Q fabry-perot resonators with long cavity based on curved, all-silicon, high reflectance mirrors

M. Malak, N. Pavy, F. Marty, Yves-Alain Peter, A. Q. Liu and T. Bourouina

Paper (2011)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/16522/
Conference Title: 24th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2011)
Conference Location: Cancun, Mexico
Conference Date(s): 2011-01-23 - 2011-01-27
Publisher: Institute of Electrical and Electronics Engineers
DOI: 10.1109/memsys.2011.5734526
Official URL: https://doi.org/10.1109/memsys.2011.5734526
Date Deposited: 18 Apr 2023 15:12
Last Modified: 05 Apr 2024 10:57
Cite in APA 7: Malak, M., Pavy, N., Marty, F., Peter, Y.-A., Liu, A. Q., & Bourouina, T. (2011, January). Stable, high-Q fabry-perot resonators with long cavity based on curved, all-silicon, high reflectance mirrors [Paper]. 24th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2011), Cancun, Mexico. https://doi.org/10.1109/memsys.2011.5734526

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