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VOA-based optical MEMS accelerometer

Kazem Zandi, Jing Zou, Brian Wong, Roman V. Kruzelecky and Yves-Alain Peter

Paper (2011)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/15967/
Conference Title: 16th International Conference on Optical MEMS and Nanophotonics (OMN 2011)
Conference Location: Istanbul, Turkey
Conference Date(s): 2011-08-08 - 2011-08-11
Publisher: IEEE Computer Society
DOI: 10.1109/omems.2011.6031059
Official URL: https://doi.org/10.1109/omems.2011.6031059
Date Deposited: 18 Apr 2023 15:13
Last Modified: 05 Apr 2024 10:56
Cite in APA 7: Zandi, K., Zou, J., Wong, B., Kruzelecky, R. V., & Peter, Y.-A. (2011, August). VOA-based optical MEMS accelerometer [Paper]. 16th International Conference on Optical MEMS and Nanophotonics (OMN 2011), Istanbul, Turkey. https://doi.org/10.1109/omems.2011.6031059

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