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The 'Recycling Trap': a Generalized Explanation of Discharge Runaway in High-Power Impulse Magnetron Sputtering

A. Anders, J. Capek, M. Hala and Ludvik Martinu

Article (2012)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/15881/
Journal Title: Journal of Physics D: Applied Physics (vol. 45, no. 1)
Publisher: IOP Publishing
DOI: 10.1088/0022-3727/45/1/012003
Official URL: https://doi.org/10.1088/0022-3727/45/1/012003
Date Deposited: 18 Apr 2023 15:10
Last Modified: 05 Apr 2024 10:56
Cite in APA 7: Anders, A., Capek, J., Hala, M., & Martinu, L. (2012). The 'Recycling Trap': a Generalized Explanation of Discharge Runaway in High-Power Impulse Magnetron Sputtering. Journal of Physics D: Applied Physics, 45(1), 5-5. https://doi.org/10.1088/0022-3727/45/1/012003

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