<  Back to the Polytechnique Montréal portal

Steady State Discharge Optimization in High-Power Impulse Magnetron Sputtering Through the Control of the Magnetic Field

J. Capek, M. Hala, O. Zabeida, Jolanta-Ewa Sapieha and Ludvik Martinu

Article (2012)

An external link is available for this item
Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/15700/
Journal Title: Journal of Applied Physics (vol. 111, no. 2)
Publisher: American Institute of Physics
DOI: 10.1063/1.3673871
Official URL: https://doi.org/10.1063/1.3673871
Date Deposited: 18 Apr 2023 15:10
Last Modified: 05 Apr 2024 10:56
Cite in APA 7: Capek, J., Hala, M., Zabeida, O., Sapieha, J.-E., & Martinu, L. (2012). Steady State Discharge Optimization in High-Power Impulse Magnetron Sputtering Through the Control of the Magnetic Field. Journal of Applied Physics, 111(2), 9 pages. https://doi.org/10.1063/1.3673871

Statistics

Dimensions

Repository Staff Only

View Item View Item