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Effect of postdeposition annealing on the structure, composition, and the mechanical and optical characteristics of niobium and tantalum oxide films

E. Cetinorgu-Goldenberg, Jolanta-Ewa Sapieha and Ludvik Martinu

Article (2012)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/15680/
Journal Title: Applied Optics (vol. 51, no. 27)
Publisher: Optical Society of America
DOI: 10.1364/ao.51.006498
Official URL: https://doi.org/10.1364/ao.51.006498
Date Deposited: 18 Apr 2023 15:10
Last Modified: 05 Apr 2024 10:56
Cite in APA 7: Cetinorgu-Goldenberg, E., Sapieha, J.-E., & Martinu, L. (2012). Effect of postdeposition annealing on the structure, composition, and the mechanical and optical characteristics of niobium and tantalum oxide films. Applied Optics, 51(27), 6498-6507. https://doi.org/10.1364/ao.51.006498

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