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Pulse Management in High Power Pulsed Magnetron Sputtering of Niobium

M. Hala, J. Capek, O. Zabeida, Jolanta-Ewa Sapieha and Ludvik Martinu

Article (2012)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/15304/
Journal Title: Surface and Coatings Technology (vol. 206, no. 19-20)
Publisher: Elsevier
DOI: 10.1016/j.surfcoat.2012.04.019
Official URL: https://doi.org/10.1016/j.surfcoat.2012.04.019
Date Deposited: 18 Apr 2023 15:11
Last Modified: 05 Apr 2024 10:56
Cite in APA 7: Hala, M., Capek, J., Zabeida, O., Sapieha, J.-E., & Martinu, L. (2012). Pulse Management in High Power Pulsed Magnetron Sputtering of Niobium. Surface and Coatings Technology, 206(19-20), 4186-4193. https://doi.org/10.1016/j.surfcoat.2012.04.019

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