Hysteresis-Free Deposition of Niobium Oxide Films by Hipims Using Different Pulse Management Strategies

M. Hála, Jiří Čapek, O. Zabeida, Jolanta-Ewa Sapieha and Ludvik Martinu

Article (2012)

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Department:	Department of Engineering Physics
PolyPublie URL:	https://publications.polymtl.ca/15303/
Journal Title:	Journal of Physics D: Applied Physics (vol. 45, no. 5)
Publisher:	IOP Publishing
DOI:	10.1088/0022-3727/45/5/055204
Official URL:	https://doi.org/10.1088/0022-3727/45/5/055204
Date Deposited:	18 Apr 2023 15:11
Last Modified:	08 Apr 2025 01:42

Cite in APA 7:	Hála, M., Čapek, J., Zabeida, O., Sapieha, J.-E., & Martinu, L. (2012). Hysteresis-Free Deposition of Niobium Oxide Films by Hipims Using Different Pulse Management Strategies. Journal of Physics D: Applied Physics, 45(5). https://doi.org/10.1088/0022-3727/45/5/055204
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