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Hysteresis-Free Deposition of Niobium Oxide Films by Hipims Using Different Pulse Management Strategies

M. Hala, J. Capek, O. Zabeida, Jolanta-Ewa Sapieha and Ludvik Martinu

Article (2012)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/15303/
Journal Title: Journal of Physics D: Applied Physics (vol. 45, no. 5)
Publisher: IOP Publishing
DOI: 10.1088/0022-3727/45/5/055204
Official URL: https://doi.org/10.1088/0022-3727/45/5/055204
Date Deposited: 18 Apr 2023 15:11
Last Modified: 05 Apr 2024 10:56
Cite in APA 7: Hala, M., Capek, J., Zabeida, O., Sapieha, J.-E., & Martinu, L. (2012). Hysteresis-Free Deposition of Niobium Oxide Films by Hipims Using Different Pulse Management Strategies. Journal of Physics D: Applied Physics, 45(5). https://doi.org/10.1088/0022-3727/45/5/055204

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