Cylindrical Surfaces Enable Wavelength-Selective Extinction and Sub-0.2 Nm Linewidth in 250 Mu M-Gap Silicon Fabry-Perot Cavities

Maurine Malak, Frédéric Marty, Nicolas Pavy, Yves-Alain Peter, Ai-Qun Liu and Tarik Bourouina

Article (2012)

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Department:	Department of Engineering Physics
PolyPublie URL:	https://publications.polymtl.ca/15030/
Journal Title:	Journal of Microelectromechanical Systems (vol. 21, no. 1)
Publisher:	IEEE
DOI:	10.1109/jmems.2011.2174427
Official URL:	https://doi.org/10.1109/jmems.2011.2174427
Date Deposited:	18 Apr 2023 15:11
Last Modified:	25 Sep 2024 15:52

Cite in APA 7:	Malak, M., Marty, F., Pavy, N., Peter, Y.-A., Liu, A.-Q., & Bourouina, T. (2012). Cylindrical Surfaces Enable Wavelength-Selective Extinction and Sub-0.2 Nm Linewidth in 250 Mu M-Gap Silicon Fabry-Perot Cavities. Journal of Microelectromechanical Systems, 21(1), 171-180. https://doi.org/10.1109/jmems.2011.2174427
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