Mechanisms of plasmon-enhanced femtosecond laser nanoablation of silicon

Alexandre Robitaille, Etienne Boulais and Michel Meunier

Article (2013)

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Department:	Department of Engineering Physics
PolyPublie URL:	https://publications.polymtl.ca/13196/
Journal Title:	Optics Express (vol. 21, no. 8)
Publisher:	Optical Society of America
DOI:	10.1364/oe.21.009703
Official URL:	https://doi.org/10.1364/oe.21.009703
Date Deposited:	18 Apr 2023 15:10
Last Modified:	08 Apr 2025 01:40

Cite in APA 7:	Robitaille, A., Boulais, E., & Meunier, M. (2013). Mechanisms of plasmon-enhanced femtosecond laser nanoablation of silicon. Optics Express, 21(8), 9703-9710. https://doi.org/10.1364/oe.21.009703
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