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Mechanisms of plasmon-enhanced femtosecond laser nanoablation of silicon

Alexandre Robitaille, Etienne Boulais and Michel Meunier

Article (2013)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/13196/
Journal Title: Optics Express (vol. 21, no. 8)
Publisher: Optical Society of America
DOI: 10.1364/oe.21.009703
Official URL: https://doi.org/10.1364/oe.21.009703
Date Deposited: 18 Apr 2023 15:10
Last Modified: 05 Apr 2024 10:53
Cite in APA 7: Robitaille, A., Boulais, E., & Meunier, M. (2013). Mechanisms of plasmon-enhanced femtosecond laser nanoablation of silicon. Optics Express, 21(8), 9703-9710. https://doi.org/10.1364/oe.21.009703

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