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Fabrication and testing of nanoporous Si₃N₄ optical filters for gas sensing applications

R. Vernhes, Jolanta-Ewa Sapieha and Ludvik Martinu

Article (2013)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/12983/
Journal Title: Sensors and Actuators B: Chemical (vol. 185)
Publisher: Elsevier
DOI: 10.1016/j.snb.2013.04.064
Official URL: https://doi.org/10.1016/j.snb.2013.04.064
Date Deposited: 18 Apr 2023 15:10
Last Modified: 05 Apr 2024 10:52
Cite in APA 7: Vernhes, R., Sapieha, J.-E., & Martinu, L. (2013). Fabrication and testing of nanoporous Si₃N₄ optical filters for gas sensing applications. Sensors and Actuators B: Chemical, 185, 504-511. https://doi.org/10.1016/j.snb.2013.04.064

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