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Effect of implantation temperature on the H-induced microstructural damage in AlN

U. Dadwal, P. Kumar, Oussama Moutanabbir, M. Reiche and R. Singh

Article (2014)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/12527/
Journal Title: Journal of Alloys and Compounds (vol. 588)
Publisher: Elsevier
DOI: 10.1016/j.jallcom.2013.10.227
Official URL: https://doi.org/10.1016/j.jallcom.2013.10.227
Date Deposited: 18 Apr 2023 15:08
Last Modified: 05 Apr 2024 10:52
Cite in APA 7: Dadwal, U., Kumar, P., Moutanabbir, O., Reiche, M., & Singh, R. (2014). Effect of implantation temperature on the H-induced microstructural damage in AlN. Journal of Alloys and Compounds, 588, 300-304. https://doi.org/10.1016/j.jallcom.2013.10.227

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