Effect of implantation temperature on the H-induced microstructural damage in AlN

U. Dadwal, Pravin Kumar, Oussama Moutanabbir, Manfred Reiche and Rajendra Singh

Article (2014)

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Department:	Department of Engineering Physics
PolyPublie URL:	https://publications.polymtl.ca/12527/
Journal Title:	Journal of Alloys and Compounds (vol. 588)
Publisher:	Elsevier
DOI:	10.1016/j.jallcom.2013.10.227
Official URL:	https://doi.org/10.1016/j.jallcom.2013.10.227
Date Deposited:	18 Apr 2023 15:08
Last Modified:	08 Apr 2025 01:39

Cite in APA 7:	Dadwal, U., Kumar, P., Moutanabbir, O., Reiche, M., & Singh, R. (2014). Effect of implantation temperature on the H-induced microstructural damage in AlN. Journal of Alloys and Compounds, 588, 300-304. https://doi.org/10.1016/j.jallcom.2013.10.227
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