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Optical MEMS: From micromirrors to complex systems

Olav Solgaard, Asif A. Godil, Roger T. Howe, Luke P. Lee, Yves-Alain Peter and Hans Zappe

Article (2014)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/11548/
Journal Title: Journal of Microelectromechanical Systems (vol. 23, no. 3)
Publisher: IEEE
DOI: 10.1109/jmems.2014.2319266
Official URL: https://doi.org/10.1109/jmems.2014.2319266
Date Deposited: 18 Apr 2023 15:08
Last Modified: 05 Apr 2024 10:50
Cite in APA 7: Solgaard, O., Godil, A. A., Howe, R. T., Lee, L. P., Peter, Y.-A., & Zappe, H. (2014). Optical MEMS: From micromirrors to complex systems. Journal of Microelectromechanical Systems, 23(3), 517-538. https://doi.org/10.1109/jmems.2014.2319266

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