Olav Solgaard, Asif A. Godil, Roger T. Howe, Luke P. Lee, Yves-Alain Peter
and Hans Zappe
Article (2014)
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| Department: | Department of Engineering Physics |
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| PolyPublie URL: | https://publications.polymtl.ca/11548/ |
| Journal Title: | Journal of Microelectromechanical Systems (vol. 23, no. 3) |
| Publisher: | IEEE |
| DOI: | 10.1109/jmems.2014.2319266 |
| Official URL: | https://doi.org/10.1109/jmems.2014.2319266 |
| Date Deposited: | 18 Apr 2023 15:08 |
| Last Modified: | 25 Sep 2024 15:48 |
| Cite in APA 7: | Solgaard, O., Godil, A. A., Howe, R. T., Lee, L. P., Peter, Y.-A., & Zappe, H. (2014). Optical MEMS: From micromirrors to complex systems. Journal of Microelectromechanical Systems, 23(3), 517-538. https://doi.org/10.1109/jmems.2014.2319266 |
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